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Characterization by X-ray diffraction of PZT(Pb(ZrxTi1-x)O3)thin films on Pt/TiN/BPSG/Si substrate

著者名:
掲載資料名:
EPDIC 3 : proceedings of the Third European Powder Diffraction Conference, held September 25 - 28, 1993, in Vienna, Austria
シリーズ名:
Materials science forum
シリーズ巻号:
166-169
発行年:
1994
巻:
Part2
開始ページ:
379
終了ページ:
384
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496822 [0878496823]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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