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Hydrogen-induced platelets in silicon:separation of nucleation and growth

著者名:
Johnson,N.M.
Herring,C.
Doland,C.
Walker,J.
Anderson,G.
Ponce,F.
さらに 1 件
掲載資料名:
Proceedings of the 16th International Conference on Defects in Semiconductors : Lehigh University, Bethlehem, Pennsylvania, 22-26 July 1991
シリーズ名:
Materials science forum
シリーズ巻号:
83-87
発行年:
1992
巻:
Pt.1
開始ページ:
33
終了ページ:
38
出版情報:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496280 [0878496289]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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