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Preparation of lithographic resist polymers by anionic polymerization

著者名:
Ito, Hiroshi ( IBM Research Division, Almaden Research Center )  
掲載資料名:
Applications of anionic polymerization research
シリーズ名:
ACS symposium series
シリーズ巻号:
696
発行年:
1998
開始ページ:
218
終了ページ:
234
出版情報:
Washington, D.C.: American Chemical Society
ISSN:
00976156
ISBN:
9780841235656 [0841235651]
言語:
英語
請求記号:
A05800/696
資料種別:
国際会議録

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