Critical issues for developing a high-throughput SCALPEL system for sub-0.18-ヲフm lithography generations
- 著者名:
Stanton,S.T. ( Integrated Solutions,Inc. ) Liddle,J.A. ( Lucent Technologies/Bell Labs. ) Waskiewicz,W.K. ( Lucent Technologies/Bell Labs. ) Mkrtchyan,M.M. ( Lucent Technologies/Bell Labs. ) Novembre,A.E. ( Lucent Technologies/Bell Labs. ) Harriott,L.R. ( Lucent Technologies/Bell Labs. ) - 掲載資料名:
- Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3331
- 発行年:
- 1998
- 開始ページ:
- 673
- 終了ページ:
- 688
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427762 [0819427764]
- 言語:
- 英語
- 請求記号:
- P63600/3331
- 資料種別:
- 国際会議録
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Benchmarking of advanced CD-SEMs against the new unified specification for sub-0.18-ヲフm lithography
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