EUV optical design for a 100-nm CD imaging system (Invited Paper)
- 著者名:
- Sweeney,D.W. ( Lawrence Livermore National Lab. )
- Hudyma,R.M. ( Lawrence Livermore National Lab. )
- Chapman,H.N. ( Lawrence Livermore National Lab. )
- Shafer,D.R. ( David Shafer Optical Design )
- 掲載資料名:
- Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3331
- 発行年:
- 1998
- 開始ページ:
- 2
- 終了ページ:
- 10
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427762 [0819427764]
- 言語:
- 英語
- 請求記号:
- P63600/3331
- 資料種別:
- 国際会議録
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