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Laser recrystallized polysilicon on SiO2 for high performance resistors

著者名:
  • Shah, Rajiv R. ( Texas Instruments Incorporated, Semiconductor Research and Development Laboratories )
  • Hollingsworth, D. Randy ( Texas Instruments Incorporated, Semiconductor Research and Development Laboratories )
  • Crosthwait, D. Lloyd ( Texas Instruments Incorporated, Semiconductor Research and Development Laboratories )
掲載資料名:
Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
5
発行年:
1982
開始ページ:
325
終了ページ:
330
出版情報:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444006974 [0444006974]
言語:
英語
請求記号:
M23500/5
資料種別:
国際会議録

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