Characterization of a New Resistor System for Advanced Multilayer Technology Materials

Characterization of a New Resistor System for Advanced Multilayer Technology Materials

著者名:

Anderson,David K. ( DuPont Electronic Materials )
Smith,J.D.
Needes,C.R.S.
Horowitz,S.J.

掲載資料名:

Proceedings : 1999 International Symposium on Microelectronics : 26-28 October 1999, Chicago, Illinois

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3906

発行年:

1999

開始ページ:

118

終了ページ:

123

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780930815585 [0930815580]

言語:

英語

請求記号:

P63600/3906

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00019023
シリーズID:	PA00000029
会議名:	International Symposium on Microelectronics
回次:	1999
会議開催地:	Chicago, Illinois, USA
会議開催年:	1999.10.26-1999.10.28

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