Optimization criteria for SRAM design:lithography contribution
- 著者名:
Cole,D.C. ( Boston Univ. ) Bula,O. Conrad,E.W. Coops,D.S. Leipold,W.C. Mann,R.W. Oppoid,J.H. - 掲載資料名:
- Optical microlithography XII : 17-19 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3679
- 発行年:
- 1999
- 巻:
- Part2
- 開始ページ:
- 847
- 終了ページ:
- 859
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431530 [0819431532]
- 言語:
- 英語
- 請求記号:
- P63600/3679
- 資料種別:
- 国際会議録
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11
国際会議録
Full-chip application for SRAM gate at 100-nm node and beyond using chromeless phase lithography
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |