High-precision micro-optic elements by wafer-scale replication on arbitrary substrates
- 著者名:
- Dannberg,P. ( Fraunhofer-Institut fur Angewandte Optik und Feinmechanik )
- Bierbaum,R.
- Erdmann,L.
- Krehl,A.
- Brauer,A.H.
- 掲載資料名:
- Optical fabrication and testing : 26-28 May 1999, Berlin, Germany
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3739
- 発行年:
- 1999
- 開始ページ:
- 206
- 終了ページ:
- 212
- 出版情報:
- Bellingham, WA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432131 [081943213X]
- 言語:
- 英語
- 請求記号:
- P63600/3739
- 資料種別:
- 国際会議録
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