Estimation of intrinsic stresses and elastic moduli in thin films

Estimation of intrinsic stresses and elastic moduli in thin films

著者名:

Andia,P.C. ( The Pennsylvania State Univ. )
Costanzo,F.
Gray,G.L.

掲載資料名:

Complex mebiums : 30 July-1 August 2000, San Diego, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

4097

発行年:

2000

開始ページ:

280

終了ページ:

290

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437426 [0819437425]

言語:

英語

請求記号:

P63600/4097

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018984
シリーズID:	PA00000029
会議名:	Optics & Photonics : Complex mebiums
回次:	2000
会議開催地:	San Diego, CA, USA
会議開催年:	2000.07.30-2000.08.01

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