Pattern collapse in high-aspect-ratio DUV and 193-nm resists
- 著者名:
Domke,W.D. ( International SEMATECH ) Graffenberg,V.L. Patel,S. Rich,G.K. Cao,H.B. Nealey,P.F. - 掲載資料名:
- Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3999
- 発行年:
- 2000
- 巻:
- Part1
- 開始ページ:
- 313
- 終了ページ:
- 321
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436177 [0819436178]
- 言語:
- 英語
- 請求記号:
- P63600/3999
- 資料種別:
- 国際会議録
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3
国際会議録
193-nm photoresists at 130-nm node:which lithographic performances for which chemical platform?
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