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A Study of Transistor Optimization in a 0.25 Micron CMOS Flow Using S/D and Silicide Process Modules and Their Interactions

著者名:
Vasanth, K.
Apte, P.
Davis, J.
Saxena, S.
Burch, R.
Rao, S.
Mozumder, P. K.
さらに 2 件
掲載資料名:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
514
発行年:
1998
開始ページ:
253
出版情報:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994201 [1558994203]
言語:
英語
請求記号:
M23500/514
資料種別:
国際会議録

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