Defect Evolution in Ion Implanted Si: From Point to Extended Defects

Defect Evolution in Ion Implanted Si: From Point to Extended Defects

著者名:

掲載資料名:

Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

504

発行年:

1999

開始ページ:

3

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994096 [1558994092]

言語:

英語

請求記号:

M23500/504

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018916
シリーズID:	PA00000011
会議名:	Symposium on atomistic mechanisms in beam synthesis and irradiation of materials
回次:	1997
会議開催地:	Boston, MA, USA
会議開催年:	1997.12.01-1997.12.02

類似資料:

1 国際会議録 Defect Evolution in Ion Implanted Silicon Benton, J.L., Libertino, S., Eaglesham, D.J., Coffa, S. Electrochemical Society	7 国際会議録 The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si Libertino, S., Coffa, S., Privitera, V., Priolo, F. MRS - Materials Research Society
2 国際会議録 Characterization of Interstitial Defect Clusters in Ion-Implanted Si Benton, J. L., Libertino, S., Coffa, S., Eaglesham, D. J. MRS - Materials Research Society	8 国際会議録 The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si Libertino, S., Coffa, S., Privitera, V., Priolo, F. MRS - Materials Research Society
3 国際会議録 The Effect of the Extra Ion on Residual Damage in MeV-Implanted Si Libertino, S., Benton, J. L., Coffa, S., Jacobson, D. C., Eaglesham, D. J., Poate, J. M., Lavalle, M., Fuochi, P. G. MRS - Materials Research Society	9 国際会議録 The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation Benton, J.L., Stolk, P.A., Eaglesham, D.J., Jacobson, D.C., Cheng, J.Y., Poate, J.M., Myers, S.M., Haynes, T.E Electrochemical Society
4 国際会議録 Self-Interstitial Clusters in Silicon La Magna, Antonino, Coffa, Salvatore, Libertino, Sebania Materials Research Society	10 国際会議録 Point-Defect Migration in Crystalline Silicon: Impurity Content, Surface and Stress Effects Coffa, S., Libertino, S., Magna, A. La, Privitera, V., Mannino, G., Priolo, F. MRS - Materials Research Society
5 国際会議録 Ion-Beam-Injected Point Defects in Crystalline Silicon: Migration, Interaction, and Trapping Phenomena Priolo, F., Privitera, V., Coffa, S., Libertino, S. MRS - Materials Research Society	11 国際会議録 Atomistic Modelling of Point and Extended Defects in Crystalline Materials Jaraiz, Martin, Pelaz, Lourdes, Rubio, Emiliano, Barbolla, Juan, Gilmer, George H., Eaglesham, David J., Gossmann, Hans … MRS - Materials Research Society
6 国際会議録 Ion-Beam Injected Point Defects in Crystalline Silicon: Migration, Interaction and Trapping Phenomena Priolo, F., Privitera, V., Coffa, S., Libertino, S. MRS - Materials Research Society	12 国際会議録 Point Defects Migration and Agglomeration in Si at Room Temperature: The Role of Surface and Impurity Content Privitera, V., Coffa, S., Larsen, K. Kyllesbech, Libertino, S., Mannino, G., Priolo, F. MRS - Materials Research Society

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