Native Oxide and the Residual Stress of Thin Mo and Ta Films
- 著者名:
- 掲載資料名:
- Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 441
- 発行年:
- 1997
- 開始ページ:
- 385
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993457 [1558993452]
- 言語:
- 英語
- 請求記号:
- M23500/441
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
8
国際会議録
Degree of Crystallinity and Strain in B4C and SiC Thin Films as a Function of Processing Conditions
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |