Blank Cover Image

THE RELIABILITY OF MULTILEVEL METALLIZATION ON InGaAs/GaAs LAYERS

著者名:
掲載資料名:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
337
発行年:
1994
開始ページ:
387
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
言語:
英語
請求記号:
M23500/337
資料種別:
国際会議録

類似資料:

1 国際会議録 THE SELECTIVITY OF REACTIVE ION ETCH OF Ga0.51In0.49P/GaAS

Wu, J. W., Chan, S. H., Lin, K. C., Chang, C. Y., Chang, E. Y.

MRS - Materials Research Society
7 国際会議録 An n+-InGaAs/n-GaAs Dual-Doped-Channel Heterostructure Field-Effect Transistor (DDC-HFET) Grown by LP-MOCVD

Chuang, H.-M., Lin, K.-W., Yu, K.-H., Chen, C.-Y., Chen, J.-Y., Lai, P.-H, Kao, C.-I., Liu, W.-C.

Electrochemical Society
2 国際会議録 Explosive phenomenon of AICu/TiN and W-plugs multilevel interconnect system

Yang,J.D., Lin,C.A., Yen,Y.T., Chen,S.F., Chang,C.H., Wu,J.S., Wu,J.R.

SPIE-The International Society for Optical Engineering
8 国際会議録 Layer Tilt and Relaxation in InGaAs/GaAs Grated Buffer Layers

Matney, K. M., Eldredge, J. W., Goorsky, M. S.

MRS - Materials Research Society
3 国際会議録 Multiple Switching Performances of a GaAs-InGaAs Metal-Insulator-Semiconductor (MIS) Like Structure

Liu, W.C., Laih, L.W., Chen, J.Y., Wang, W.C., Lin, P.H.

Electrochemical Society
9 国際会議録 REACTIVE ION ETCH OF GaAs AND AlGaAs USING BCl3, SiCl4 AND SF6 INSTEAD OF CCl2F2

Wu, J. W., Chang, C. Y., Lin, K. C., Chang, E. Y., Hwang, J. H.

MRS - Materials Research Society
4 国際会議録 On the Investigation of Power and Reliability Performance of Pseudomorphic AlGaAs/InGaAs HEMT's

Li, G. P., Chou, Y. C., Chen, Y. C., Wu, C. S., Yu, K. K., Midford, T. A., Liu, Y., Sonek, G. J., Wei, X., Tromberg, B. …

MRS - Materials Research Society
10 国際会議録 Preparation of High Two Dimensional Electron Gas Concentration with Enhanced Mobility in GaAS/InGaAs Pseudomorphic Heterostructures

T. S. Wu, W. C. Hsu, H. M. Shieh, C. L. Wu, W. Lin

Electrochemical Society
5 国際会議録 Multiple Negative-Differential-Resistance (MNDR) of a Graded AlxGa1-xAs/GaAs Heterostructure-Emitter Bipolar Transistor (HEBT) with a Pseudomorphic InGaAs/GaAs …

Liu, W.-C., Tsai, J.-H., Cheng, S.-Y., Wang, W.-C., Lin, P.-H., Chen, J.-Y.

Electrochemical Society
11 国際会議録 Long-wavelength shift of ZnSSe metal-semiconductor-metal light-emitting diodes with high injection currents

Su,Y.K., Chen,W.R., Chang,S.-J., Juang,F.-S., Lan,W.H., Lin,A.C.H., Chang,H.

SPIE - The International Society for Optical Engineering
6 国際会議録 Reliability of Electrodeposited Copper and ECRCVD SiOF Films for Multilevel Metallization

Kim, Y-A., Kim, Y-I., Lee, K-W., Lee, S., Oh, K., Park, J-W., Sohn, S., Yang, S-H.

Materials Research Society
12 国際会議録 Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility

Kizilyalli,I.C., Abein,G., Chen,Z., Weber,G.R., Register,F., Harris,E., Chetlur,S., Higashi,G.S., Schofieled,M., Sen,S., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12