Direct bonding between spacer and field emitter array using an electron-beam-evaporated interlayer
- 著者名:
Park,H.-W. ( Korea Institute of Science and Technology ) Ju,B.-K. Lee,Y.-H. Kang,I.-B. Samaan,N.D. Haskard,M.R. Park,J.-H. Oh,M.-H. - 掲載資料名:
- Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3046
- 発行年:
- 1997
- 開始ページ:
- 328
- 終了ページ:
- 335
- 出版情報:
- Bellingham: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819424594 [0819424595]
- 言語:
- 英語
- 請求記号:
- P63600/3046
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |