Micromachined pressure sensors:review and recent developments

Micromachined pressure sensors:review and recent developments

著者名:

Eaton,W.P. ( Sandia National Labs. )
Smith,J.H.

掲載資料名:

Smart structures and materials 1997 : Smart electronics and MEMS : 4-6 March 1997, San Diego, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3046

発行年:

1997

開始ページ:

30

終了ページ:

41

出版情報:

Bellingham: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424594 [0819424595]

言語:

英語

請求記号:

P63600/3046

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018900
シリーズID:	PA00000029
会議名:	Smart Structures and Materials
回次:	1997
会議開催地:	San Diego, CA, USA
会議開催年:	1997.03.04-1997.03.06

類似資料:

1 国際会議録 Characterization of a surface micromachined pressure sensor array Eaton,W.P., Smith,J.H. SPIE-The International Society for Optical Engineering	7 国際会議録 First reliability test of a surface-micromachined microengine using SHiMMeR Tanner,D.M., Smith,N.F., Bowman,D.J., Eaton,W.P., Peterson,K.A. SPIE-The International Society for Optical Engineering
2 国際会議録 Planar surface-micromachined pressure sensor with a subsurface,embedded reference pressure cavity Eaton,W.P., Smith,J.H. SPIE-The International Society for Optical Engineering	8 国際会議録 Micromachined sensor and actuator research at the Microelectronics Development Laboratory J.H. Smith, C.C. Barron, J.G. Fleming, S. Montague, J.L. Rodriguez Society of Photo-optical Instrumentation Engineers
3 国際会議録 CMOS-compatible surface-micromachined pressure sensor for aqueous ultrasonic application W.P. Eaton, J.H. Smith Society of Photo-optical Instrumentation Engineers	9 国際会議録 Development of characterization tools for reliability testing of micro-electro-mechanical system actuators Smith,N.F., Eaton,W.P., Tanner,D.M., Allen,J.J. SPIE - The International Society for Optical Engineering
4 国際会議録 Release-etch modeling for complex surface-micromachined structures Eaton,W.P., Smith,J.H., Jarecki,R.L. SPIE-The International Society for Optical Engineering	10 国際会議録 Ultralow-cost surface-micromachined tunneling sensors Vickers,D.J., Kubena,R.L., Stratton,F.P., Robinson,W.P., Joyce,R.L., Hackett,L.H. SPIE-The International Society for Optical Engineering
5 国際会議録 Characterization techniques for surface-micromachined devices Eaton,W.P., Smith,N.F., Irwin,L.W., Tanner,D.M. SPIE-The International Society for Optical Engineering	11 国際会議録 Linkage design effect on the reliability of surface-micromachined microengines driving a load Tanner,D.M., Peterson,K.A., Irwin,L.A., Tangyunyong,P., Miller,W.M., Eaton,W.P., Smith,N.F., Rodgers,M.S. SPIE-The International Society for Optical Engineering
6 国際会議録 Characterization techniques for surface-micromachined devices Eaton,W.P., Smith,N.F., Irwin,L.W., Tanner,D.M. SPIE-The International Society for Optical Engineering	12 国際会議録 Automotive Pressure Sensors: Evolution of a Micromachined Sensor Application Schuster, J.P., Czarnocki, W.S. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12