Tabletop factory to fabricate 3D microstructures:nano manufacturing world

Tabletop factory to fabricate 3D microstructures:nano manufacturing world

著者名:

Nakao,M. ( Univ.of Tokyo )
Hatamura,Y.
Sato,T.

掲載資料名:

Microrobotics : components and applications : 21-22 November, 1996, Boston, Massachusetts

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2906

発行年:

1996

開始ページ:

58

終了ページ:

65

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819423085 [0819423084]

言語:

英語

請求記号:

P63600/2906

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018886
シリーズID:	PA00000029
会議名:	Photonics East : Microrobotics : Components and Applications
回次:	1996
会議開催地:	Boston, MA, USA
会議開催年:	1996.11.21-1996.11.22

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