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Trench isolation technology for high-performance complementary bipolar devices

著者名:
Brown,K.C. ( National Semiconductor Corp. )
Bracken,C.
Bashir,R.
Egan,K.
DeSantis,J.
Kabir,A.E.
Yindeepol,W.
McGregor,J.
Prasad,S.J.
Razouk,R.
Boksha,V.V.
Rey,J.C.
さらに 7 件
掲載資料名:
Microelectronic Device and Multilevel Interconnection Technology II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2875
発行年:
1996
開始ページ:
48
終了ページ:
61
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422736 [0819422738]
言語:
英語
請求記号:
P63600/2875
資料種別:
国際会議録

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