Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

著者名:

Gliech,S. ( Fraunhofer-Institut fur Angewandte Optik und Feinmechanik )
Duparre,A.

掲載資料名:

Specification, Production, and Testing of Optical Components and Systems

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2775

発行年:

1996

巻:

Part1

開始ページ:

297

終了ページ:

304

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421609 [081942160X]

言語:

英語

請求記号:

P63600/2775

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018873
シリーズID:	PA00000029
会議名:	Optical Instrumentation & System Design : Specification,Production,and Testing of Optical Components and Systems
回次:	1996
会議開催地:	Glasgow, Scotland, UK
会議開催年:	1996.05.13-1996.05.16

類似資料:

1 国際会議録 Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement Duparre,A., Gliech,S. SPIE-The International Society for Optical Engineering	7 国際会議録 Sensitive and flexible light scatter techniques from the VUV to IR regions [5965-48] Schroder, S., Gliech, S., Duparre, A. SPIE - The International Society of Optical Engineering
2 国際会議録 System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm Gliech, S., Gessner, H., Duparre, A. SPIE-The International Society for Optical Engineering	8 国際会議録 VUV light scattering measurements of substrtes and thin film coatings Hultaker, A., Gliech, S., Benkert, N., Duparre, A. SPIE - The International Society of Optical Engineering
3 国際会議録 Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement Duparre,A., Gliech,S. SPIE-The International Society for Optical Engineering	9 国際会議録 Scatter analysis of optical componets from 193 nm to 13.5 nm [5878-30] Schroeder, S., Kamprath, M., Gliech, S., Duparre, A. SPIE - The International Society of Optical Engineering
4 国際会議録 DUV/VUV light scattering measurement of optical components for lithography applications Gliech,S., Steinert,J., Flemming,M., Duparre,A. SPIE-The International Society for Optical Engineering	10 国際会議録 Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods Pichlmaier,S., Hehl,K., Schuhmann,U., Gliech,S., Duparre,A. SPIE-The International Society for Optical Engineering
5 国際会議録 Scattering analysis of optical components in the DUV [6101-30] Schroder, S., Gliech, S., Duparre, A. SPIE - The International Society of Optical Engineering	11 国際会議録 Wide-scale surface characterization by combination of scanning force microscopy,white light interferometry,and light scattering Gliech,S., Duparre,A., Recknagel,R.-J., Notni,G. SPIE - The International Society for Optical Engineering
6 国際会議録 Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter Hultaker, A., Benkert, N., Gliech, S., Duparre, A. SPIE-The International Society for Optical Engineering	12 国際会議録 Advanced methods for surface and subsurface defect characterization of optical components Steinert,J., Gliech,S., Wuttig,A., Duparre,A., Truckenbrodt,H. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12