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Formation of submicrometer current-blocking layer for high-power GaAs/AlGaAs quantum wire array laser

著者名:
Kim,T.-G. ( Korea Univ. )
Hwang,S.-M.
Kim,S.-I.
Son,C.-S.
Kim,E.K.
Min,S.-K.
Park,J.-H.
Park,K.-H.
さらに 3 件
掲載資料名:
Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
2723
発行年:
1996
開始ページ:
63
終了ページ:
67
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420992 [0819420999]
言語:
英語
請求記号:
P63600/2723
資料種別:
国際会議録

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