Formation of Ultra Shallow Donors in Silicon by Long-Term-Annealing at 470 °C
- 著者名:
- 掲載資料名:
- Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 258-263
- 発行年:
- 1997
- 巻:
- Part1
- 開始ページ:
- 385
- 終了ページ:
- 390
- 出版情報:
- Zurich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878497874 [0878497870]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
5
国際会議録
ON THE QUESTION OF OXYGEN DIFFUSION DURING OXYGEN RELATED THERMAL DONOR FORMATION IN SILICON
Materials Research Society |
Electrochemical Society |
Trans Tech Publications |
Trans Tech Publications |