Electrical characterization ofelectron beam induced defects in epitaxially grown Si1-xGex
- 著者名:
Mamor,M. Auret,F.D. Goodman,S.A. Myburg,G. Deenapanray,P.N.K. Meyer,W.E. - 掲載資料名:
- Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 258-263
- 発行年:
- 1997
- 巻:
- Part1
- 開始ページ:
- 115
- 終了ページ:
- 120
- 出版情報:
- Zurich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878497874 [0878497870]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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