Internal stress tensor determination in molybdenum and molybdenum-carbon thin films deposited by D.C.magnetron sputtering

Internal stress tensor determination in molybdenum and molybdenum-carbon thin films deposited by D.C.magnetron sputtering

著者名:

掲載資料名:

EPDIC 2 : proceedings of the Second European Powder Diffraction Conference, held, July 30 - August 1, 1992, in Enschede, The Netherlands

シリーズ名:

Materials science forum

シリーズ巻号:

133-136

発行年:

1993

巻:

Pt.2

開始ページ:

873

終了ページ:

878

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496617 [0878496610]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018822
シリーズID:	PA00000012
会議名:	European Powder Diffraction Conference
回次:	2nd
会議開催地:	Enschede, The Netherlands
会議開催年:	1992.07.30-1992.08.01

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