Hydrogen loss and interdiffusion in amorphous Si/SiC multilayers

Hydrogen loss and interdiffusion in amorphous Si/SiC multilayers

著者名:

Zorn,G.

掲載資料名:

EPDIC 1 : proceedings of the First European Powder Diffraction Conference held, March 14th - 16th, 1991. in Munich, Germany

シリーズ名:

Materials science forum

シリーズ巻号:

79-82

発行年:

1991

巻:

Pt.2

開始ページ:

887

終了ページ:

892

出版情報:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496341 [0878496343]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018820
シリーズID:	PA00000012
会議名:	European Powder Diffraction Conference : EPDIC 1
回次:	1st
会議開催地:	Munich, Germany
会議開催年:	1991.03.14-1991.03.16

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4 国際会議録 Atomic interdiffusion in Au/amorphous Ni-Nb/semiconducto systems Doyle, B. L., Peercy, P. S., Thomas, R. E., Perespezko, J. H, Wiley, J. D. North-Holland	10 国際会議録 THE EFFECT OF SELF-IMPLANTATION ON THE INTERDIFFUSION OF AMORPHOUS Si/Ge MULTILAYERS Park, B., Spaepen, F., Poate, J.M., Jacobson, D.C. Materials Research Society
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