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Texture and lattice strain determination of molybdenum thin films deposited by D.C.magnetron sputtering

著者名:
掲載資料名:
EPDIC 1 : proceedings of the First European Powder Diffraction Conference held, March 14th - 16th, 1991. in Munich, Germany
シリーズ名:
Materials science forum
シリーズ巻号:
79-82
発行年:
1991
巻:
Pt.2
開始ページ:
653
終了ページ:
658
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496341 [0878496343]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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