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Quality assessment of supersmooth to rough surfaces by multiple-wavelength light scattering measurement

著者名:
  • Duparre,A. ( Fraunhofer Institute for Applied Optics and Precision Engineering (FRG) )
  • Gliech,S. ( Fraunhofer Institute for Applied Optics and Precision Engineering (FRG) )
掲載資料名:
Scattering and surface roughness : 30-31 July 1997, San Diego, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3141
発行年:
1997
開始ページ:
57
終了ページ:
64
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425638 [081942563X]
言語:
英語
請求記号:
P63600/3141
資料種別:
国際会議録

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