DC magnetron-sputtered molybdenum thin films for micromechanical structures

DC magnetron-sputtered molybdenum thin films for micromechanical structures

著者名:

Kwok,C.Y. ( Univ.of New South Wales (Australia) )
Puzzer,T. ( Univ.of New South Wales (Australia) )
Lin,K.M. ( Mosel-Vitelic (Taiwan) )
Haji-Babaei,J. ( Univ.of New South Wales (Australia) )

掲載資料名:

Smart materials, structures, and integrated systems : 11-13 December 1997, Adelaide, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3241

発行年:

1997

開始ページ:

143

終了ページ:

150

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426796 [0819426792]

言語:

英語

請求記号:

P63600/3241

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018786
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart materials, structures, and integrated systems
回次:	1997
会議開催地:	Adelaide, Australia
会議開催年:	1997.12.11-1997.12.13

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