Design and testing of polysilicon surface-micromachined piston micromirror arrays
- 著者名:
- Cowan,W.D. ( Air Force Institute of Technology )
- Bright,V.M. ( Univ.of Colorado/Boulder )
- Lee,M.K. ( Air Force Institute of Technology )
- Comtois,J.H. ( Air Force Research Lab. )
- Michalicek,M.A. ( Air Force Research Lab. )
- 掲載資料名:
- Spatial light modulators : 28-29 January 1998, San Jose, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3292
- 発行年:
- 1998
- 開始ページ:
- 60
- 終了ページ:
- 70
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427311 [0819427314]
- 言語:
- 英語
- 請求記号:
- P63600/3292
- 資料種別:
- 国際会議録
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SPIE-The International Society for Optical Engineering | |
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |