Contamination monitoring for ammonia,amines,and acid gases utilizing ion mobility spectroscopy (IMS)
- 著者名:
- Bacon,T. ( Molecular Analytics )
- Webber,K. ( Molecular Analytics )
- Carpio,R.A. ( SEMATECH )
- 掲載資料名:
- Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3332
- 発行年:
- 1998
- 開始ページ:
- 550
- 終了ページ:
- 559
- 出版情報:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427779 [0819427772]
- 言語:
- 英語
- 請求記号:
- P63600/3332
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
American Institute of Chemical Engineers |
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
D. Reidel Publishing Company |
American Chemical Society |