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Implementation of a closed-loop CD and overlay controller for sub-0.25-ｦﾌm patterning

著者名:
Sturtevant,J.L. ( Motorola )
Weilemann,M.R. ( Motorola )
Green,K.G. ( Motorola )
Dwyer,J. ( Motorola )
Robertson,E. ( Motorola )
Hershey,R.R. ( Motorola )
さらに 1 件
掲載資料名:
Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3332
発行年:
1998
開始ページ:
461
終了ページ:
470
出版情報:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427779 [0819427772]
言語:
英語
請求記号:
P63600/3332
資料種別:
国際会議録

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