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PMMA microstructure as KrF excimer-laser LIGA material

著者名:
Yang,C.R. ( Precision Instrument Development Ctr. (Taiwan) )
Chou,B.C.S. ( Precision Instrument Development Ctr. (Taiwan) )
Chou,E.H.Y. ( Precision Instrument Development Ctr. (Taiwan) )
Lin,F.H.H. ( Precision Instrument Development Ctr. (Taiwan) )
Kuo,W.K. ( Precision Instrument Development Ctr. (Taiwan) )
Luo,R.K.S. ( Precision Instrument Development Ctr. (Taiwan) )
Chang,J.W. ( Precision Instrument Development Ctr. (Taiwan) )
Wei,Z.J. ( National Tsing Hua Univ.(Taiwan) )
さらに 3 件
掲載資料名:
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3511
発行年:
1998
開始ページ:
342
終了ページ:
348
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429704 [0819429708]
言語:
英語
請求記号:
P63600/3511
資料種別:
国際会議録

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