Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching

Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching

著者名:

Manginell,R.P. ( Sandia National Labs. )
Frye-Mason,G.C. ( Sandia National Labs. )
Schubert,W.K. ( Sandia National Labs. )
Shul,R.J. ( Sandia National Labs. )
Willison,C.G. ( Sandia National Labs. )

掲載資料名:

Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3511

発行年:

1998

開始ページ:

269

終了ページ:

276

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429704 [0819429708]

言語:

英語

請求記号:

P63600/3511

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018768
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachining and Microfabrication Process Technology
回次:	1998 : 4th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1998.09.21-1998.09.22

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