Dual electron beam processing system for semiconductor materials
- 著者名:
- McMahon, R.A. ( Cambridge University Engineering Department )
- Davis, J.R. ( Cambridge University Engineering Department )
- Ahmed, H. ( Cambridge University Engineering Department )
- 掲載資料名:
- Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposia proceedings
- シリーズ巻号:
- 4
- 発行年:
- 1982
- 開始ページ:
- 783
- 終了ページ:
- 788
- 出版情報:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006936 [0444006931]
- 言語:
- 英語
- 請求記号:
- M23500/4
- 資料種別:
- 国際会議録
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