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Characterization of ion-implanted Si rapidly annealed with incoherent light

著者名:
Benton, J.L. ( Bell Laboratories )
Celler, G.K. ( Bell Laboratories )
Jacobson, D.C. ( Bell Laboratories )
Kimerling, L.C. ( Bell Laboratories )
Lischner, D.J. ( Bell Laboratories )
Miller, G.L. ( Bell Laboratories )
Robinson, Mc.D. ( Bell Laboratories )
さらに 2 件
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
765
終了ページ:
770
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

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