Multiple scanned electron beam annealing of Si implanted GaAs

Multiple scanned electron beam annealing of Si implanted GaAs

著者名:

Bujatti, M. ( SELENIA S.p.A., Research Laboratories )
Cetronio, A. ( SELENIA S.p.A., Research Laboratories )
Nipoti, R. ( CNR - Istituto LAMEL )
Olzi, E. ( CNR - Istituto LTM )

掲載資料名:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

4

発行年:

1982

開始ページ:

695

終了ページ:

700

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

言語:

英語

請求記号:

M23500/4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018762
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting
回次:	1981
会議開催地:	Boston, MA, USA
会議開催年:	1981.11.16-1981.11.19

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2 国際会議録 ACTIVATION UNIFORMITY DEPENDENCE OF UNDOPED SEMI-INSULATING GaAs ON POST-IMPLANT ANNEALING CONDITIONS Lanzieri, C., Graffitti, R., Cetronio, A. Materials Research Society	8 国際会議録 Comparison between Chemical and Electrical Profiles in Al+ or N+ Implanted and Annealed 6H-SiC Nipoti, R., Carnera, A., Raineri, V. Trans Tech Publications
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5 国際会議録 TRANSIENT SCANNING ELECTRON BEAM ANNEALING METHODS USED TO STUDY DIFFUSION AND DEFECTS IN IMPLANTED SILICON Hart, M.J., Evans, A.G.R., Amaratunga, G.A.J. Materials Research Society	11 国際会議録 A STUDY OF DIFFUSION, CLUSTERING AND DEFECTS IN As+ AND BF2+ IMPLANTED SILICON DURING SCANNING ELECTRON BEAM ANNEALING Hart, Michael J., Evans, Alan G. R., Amaratunga, Gehan A. J. Materials Research Society
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