Pulsed electron beam processing of silicon

Pulsed electron beam processing of silicon

著者名:

Greenwald, Anton C. ( Spire Corporation )
Little, Roger G. ( Spire Corporation )
Spitzer, Mark B. ( Spire Corporation )
Wolfson, Robert G. ( Spire Corporation )

掲載資料名:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

4

発行年:

1982

開始ページ:

621

終了ページ:

626

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

言語:

英語

請求記号:

M23500/4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018762
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting
回次:	1981
会議開催地:	Boston, MA, USA
会議開催年:	1981.11.16-1981.11.19

類似資料:

1 国際会議録 Pulsed electron beam processing of silicon devices Greenwald, A.C., Dolan, R.P., Tobin, S.P. North Holland	7 国際会議録 Narrow Band Emission From Lithographically Defined Photonic Bandgap Structures In Silicon: Matching Theory And Experiment Greenwald, Anton C., Daly, James T., Johnson, Edward A., Kinkade, Brian, McNeal, Mark, Pralle, Martin, Moelders, … Materials Research Society
2 国際会議録 A new electron beam polishing technique for heteroepitaxial thin films Tobin, S.P., Greenwald, A.C., Wolfson, R.G., Wong, T.T. North Holland	8 国際会議録 Thermodynamic Processes and Phenomena Induced by High Current Pulsed Electron Beam Y. Qin, Z.F. Song, C. Dong, X.G. Wang, S.Z. Hao, J.X. Zou, A.M. Wu, Q.F. Guan Trans Tech Publications
3 国際会議録 RAPID DIFFUSION OF MOLYBDENUM TRACE CONTAMINATION IN SILICON Tobin, S. P., Greenwald, A. C., Wolfson, R. G., Meier, D. L., Drevinsky, P. J. Materials Research Society	9 国際会議録 SOFT VACUUM, PULSED ELECTRON BEAM PROCESSING OF POLYMIDES Krishnaswamy, J., Li, L., Collins, G. J., Hiraoka, H., Caolo, M. A. Materials Research Society
4 国際会議録 ION BEAM DEPOSITION OF DIAMOND-LIKE COATING Greenwald, Anton C., Hirvonen, James K.., Jaggi, Narendra K. Materials Research Society	10 国際会議録 The infrared spectrograph on the Spitzer Space Telescope Houck, J. R., Roeliig, T. L., Van Cleve, J., Forrest, W. J., Herter, T. L., Lawrence, C. R., Matthews, K., Reitsema, H. … SPIE - The International Society of Optical Engineering
5 国際会議録 Electron Beam Processing of Aluminium Alloys P. Yu, M. Qian, D. Tomus, C.A. Brice, G.B. Schaffer Trans Tech Publications	11 国際会議録 Microstructure Modifications Induced by Pulsed Electron Beam in Steels Y. Samih, B. Bolle, N. Alain-Bonasso, S.Z. Hao, C. Dong Trans Tech Publications
6 国際会議録 MOCVD OF YTTRIA STABILIZED ZIRCONIA ON Co-Cr Greenwald, Anton C., Loges, Peter G., Kaloyeros, Alain E. MRS - Materials Research Society	12 国際会議録 Tuned infrared emission from lithographically-defined silicon surface structures Daly, James T., Johnson, Edward A., Stevenson, William A., Greenwald, Anton C., Wollam John A., George, Thomas, Jones, … MRS-Materials Research Society

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