Laser processing of porous silicon

Laser processing of porous silicon

著者名:

Baumgart, H. ( Bell Laboratories )
Frye, R.C. ( Bell Laboratories )
Trimble, L.E. ( Bell Laboratories )
Leamy, H.J. ( Bell Laboratories )
Celler, G.K. ( Bell Laboratories )

掲載資料名:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

4

発行年:

1982

開始ページ:

609

終了ページ:

614

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

言語:

英語

請求記号:

M23500/4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018762
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting
回次:	1981
会議開催地:	Boston, MA, USA
会議開催年:	1981.11.16-1981.11.19

類似資料:

1 国際会議録 Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films Baumgart, H., Leamy, H.J., Trimble, L.E., Doherty, C.J., Celler, G.K. North-Holland	7 国際会議録 Laser fabrication of silicon on dielectric substrates Leamy, H.J. North Holland
2 国際会議録 Seeded growth of Si over SiO2 substrates by cw laser irradiation Trimble, L.E., Celler, G.K., Ng, K.K., Baumgart, H., Leamy, H.J. North Holland	8 国際会議録 Laser epitaxy over buried layers Weeks, S.P., Celler, G.K., Leamy, H.J. North Holland
3 国際会議録 DIELECTRIC ISOLATION USING POROUS SILICON Baumgart, H., Frye, R. C., Phillipp, F., Leamy, H. J. North Holland	9 国際会議録 Explosive crystallization of amorphous germanium films Leamy, H.J., Brown, W.L., Celler, G.K., Foti, G., Gilmer, G.H., Fan, J.C.C. North Holland
4 国際会議録 Laser crystallization of deposited silicon films Celler, G.K., Jeamy, H.J., Aspnes, D.E., Doherty, C.J., Sheng, T.T., Trimble, L.E. North Holland	10 国際会議録 Surface mobilities in laser-processed polysilicon films Frye, R.C., Ng, K.K. North-Holland
5 国際会議録 Laser growth of thin silicon crystals in patterned structures Fastow, R.M., Leamy, H.J., Celler, G.K., Wong, Y.H., Doherty, C.J. North Holland	11 国際会議録 Laser induced diffusion of radioactive As into Si Pfeiffer, Loren, Kovacs, T., Celler, G.K., Trimble, L.E., Jacobson, D.C. North Holland
6 国際会議録 Defect formation in cw CO2 laser annealed silicon Baumgart, H., Phillipp, F., Leamy, H.J. North Holland	12 国際会議録 Strain Relaxation in Patterned Strained Silicon-on-Insulator by Raman Spectroscopy D. Gu, H. Baumgart, M. Zhu, G.K. Celler Electrochemical Society

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