Grain enlargment in polysilicon on insulating substrates induced by Q-switched Nd:YAG laser irradiation

Grain enlargment in polysilicon on insulating substrates induced by Q-switched Nd:YAG laser irradiation

著者名:

Falster, R.J. ( Quantronix Corp. )
Eggermont, G.E.J. ( Philips Research Laboratories Sunnyvale, Signetics Corp. )
Gibbons, J.F. ( Stanford Electronics Laboratories )

掲載資料名:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

4

発行年:

1982

開始ページ:

523

終了ページ:

528

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

言語:

英語

請求記号:

M23500/4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018762
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting
回次:	1981
会議開催地:	Boston, MA, USA
会議開催年:	1981.11.16-1981.11.19

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