Defect formation in cw CO2 laser annealed silicon

Defect formation in cw CO2 laser annealed silicon

著者名:

Baumgart, H. ( Bell Laboratories )
Phillipp, F. ( Max Planck Institut fur Metallforschung )
Leamy, H.J. ( Bell Laboratories )

掲載資料名:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposia proceedings

シリーズ巻号:

4

発行年:

1982

開始ページ:

355

終了ページ:

360

出版情報:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

言語:

英語

請求記号:

M23500/4

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018762
シリーズID:	PA00000010
会議名:	Materials Research Society Annual Meeting
回次:	1981
会議開催地:	Boston, MA, USA
会議開催年:	1981.11.16-1981.11.19

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1 国際会議録 DIELECTRIC ISOLATION USING POROUS SILICON Baumgart, H., Frye, R. C., Phillipp, F., Leamy, H. J. North Holland	7 国際会議録 Seeded growth of Si over SiO2 substrates by cw laser irradiation Trimble, L.E., Celler, G.K., Ng, K.K., Baumgart, H., Leamy, H.J. North Holland
2 国際会議録 Dislocation nucleation, growth and suppression during CW laser annealing of silicon Rozgonyi, G.A., Baumgart, H., Phillipp, F. North Holland	8 国際会議録 Picosecond laser pulse induced damage in crystalline silicon Merkle, K.L., Uebbing, R.H., Baumgart, H., Phillipp, F. North Holland
3 国際会議録 HIGH-VOLTAGE ELECTRON MICROSCOPY INVESTIGATION OF SUBGRAIN BOUNDARIES IN RECRYSTALLIZED SILICON-ON-INSULATOR STRUCTURES Baumgart, H., Phillipp, F. Materials Research Society	9 国際会議録 Structural modifications of amorphized silicon surfaces following picosecond laser irradiation Rozgonyi, G.A., Baumgart, H., Phillipp, F., Uebbing, R., Oppolzer, H. North Holland
4 国際会議録 Laser processing of porous silicon Baumgart, H., Frye, R.C., Trimble, L.E., Leamy, H.J., Celler, G.K. North Holland	10 国際会議録 DEFECT-FREE COALESCENCE OF SILICON LAYERS OVER SiO2 Banhart, F., Nagel, N., Phillipp, F., Bauser, E. MRS - Materials Research Society
5 国際会議録 Laser fabrication of silicon on dielectric substrates Leamy, H.J. North Holland	11 国際会議録 PULSED-CO2-LASER ANNEALING OF ION-IMPLANTED SILICON Jamas, R. B., Narayan, J., Christie, W. H., Eby, R. E., Holland, R. W., Wood, R. F. Materials Research Society
6 国際会議録 Diffusion of arsenic and phosphorus in laser-processed-polycrystalline-silicon-thin-films Baumgart, H., Leamy, H.J., Trimble, L.E., Doherty, C.J., Celler, G.K. North-Holland	12 国際会議録 STRUCTURAL PROPERTIES OF DIELECTRIC LAYERS FOLLOWING CO2 LASER IRRADIATION OF SOI STRUCTURES Baumgart, H., Arnold, E., Petruzzelo, J., McGee, T. F., Frommer, M. H. North Holland

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