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Thermal stability of ion implanted, laser annealed films

著者名:
Wilson, S.R. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Paulson, W.M. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Tam, G. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Gregory, R.B. ( Motorola, Inc., Semiconductor Research and Development Lab. )
White, C.W. ( Solid State Division, Oak Ridge National Lab. )
Appleton, B.R. ( Solid State Division, Oak Ridge National Lab. )
さらに 1 件
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
287
終了ページ:
292
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

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