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Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon

著者名:
Takai, M. ( Faculty of Engineering Science, Osaka University )
Sato, Y. ( Faculty of Engineering Science, Osaka University )
Murakami, K. ( The Institute of Material Science, University of Tsukuba )
Gamo, K. ( Faculty of Engineering Science, Osaka University )
Minamisono, T. ( Faculty of Science, Osaka University )
Namba, S. ( Faculty of Engineering Science, Osaka University )
さらに 1 件
掲載資料名:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposia proceedings
シリーズ巻号:
4
発行年:
1982
開始ページ:
91
終了ページ:
96
出版情報:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
言語:
英語
請求記号:
M23500/4
資料種別:
国際会議録

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