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Multi-degree-of-freedom displacement measurement system using a diffraction grating

著者名:
掲載資料名:
Laser diodes and leds in industrial, measurement, imaging, and sensors applications II : testing, packaging, and reliability of semiconductor lasers V : 26-25 January 2000, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3945
発行年:
2000
開始ページ:
150
終了ページ:
157
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435620 [0819435627]
言語:
英語
請求記号:
P63600/3945
資料種別:
国際会議録

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