Zone-plate array lithography(ZPAL):a new maskless approach
- 著者名:
- Carter,D.J.D. ( Massachusetts Institute of Technology )
- Gil,D.
- Menon,R.
- Djomehri,I.J.
- Smith,H.L.
- 掲載資料名:
- Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3676
- 発行年:
- 1999
- 巻:
- Part1
- 開始ページ:
- 324
- 終了ページ:
- 332
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431509 [0819431508]
- 言語:
- 英語
- 請求記号:
- P63600/3676
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
American Society of Mechanical Engineers |
2
国際会議録
Zone-plate-array lithography (ZPAL): optical maskless lithography for cost-effective patterning
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
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10
国際会議録
Large-field ion optics for projection and proximity printing and for maskless lithography (MLZ)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |