High-power plasma discharge source at 13.5 nm and 11.4 nm for EUV lithography
- 著者名:
Silfvast,W.T. ( CREOL/Univ.of Central Florida ) Klosner,M. Shimkaveg,G.M. Bender,H. Kubiak,G.D. Fornaciari,N. - 掲載資料名:
- Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3676
- 発行年:
- 1999
- 巻:
- Part1
- 開始ページ:
- 272
- 終了ページ:
- 275
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431509 [0819431508]
- 言語:
- 英語
- 請求記号:
- P63600/3676
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |