Blank Cover Image

Finite element modeling of SCALPEL masks

著者名:
Engelstad,R.L. ( Univ.of Wisconsin/Madison )
Lovell,E.G.
Dicks,G.A.
Martin,C.J.
Schlax,M.P.
Semke,W.H.
Liddle,J.A.
Novembre,A.E.
さらに 3 件
掲載資料名:
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3676
発行年:
1999
巻:
Part1
開始ページ:
128
終了ページ:
139
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431509 [0819431508]
言語:
英語
請求記号:
P63600/3676
資料種別:
国際会議録

類似資料:

1 国際会議録 Stress mapping techniques for the SCALPEL mask membrane system

Schlax,M.P., Engelstad,R.L., Lovell,E.G., Liddle,J.A., Novembre,A.E.

SPIE - The International Society for Optical Engineering
7 国際会議録 Finite element modeling of ion-beam lithography masks for pattern transfer distortions

Frisque,G.A., Tejeda,R.O., Lovell,E.G., Engelstad,R.L.

SPIE - The International Society for Optical Engineering
2 国際会議録 Modal analysis of the SCALPEL mask using experimental and numerical methods

Semke,W.H., Schlax,M.P., Engelstad,R.L., Lovell,E.G., Liddle,J.A.

SPIE - The International Society for Optical Engineering
8 国際会議録 Dynamic characterization of step-induced vibrations of x-ray mask membranes

Schlax,M.P., Engelstad,R.L., Lovell,E.G.

SPIE-The International Society for Optical Engineering
3 国際会議録 Equivalent modeling of SCALPEL mask membrane distortion

Dicks,G.A., Engelstad,R.L., Lovell,E.G., Liddle,J.A.

SPIE-The International Society for Optical Engineering
9 国際会議録 Comparison of substrate curvature and resonant frequency thin film stress mapping techniques

Schlax,M.P., Engelstad,R.L., Lovell,E.G., Brooks,C.J., Magg,C.

SPIE - The International Society for Optical Engineering
4 国際会議録 SCALPEL mask parametric study

Dicks,G.A., Engelstad,R.L., Lovell,E.G., Liddle,J.A.

SPIE-The International Society for Optical Engineering
10 国際会議録 Experimental model verification of the thermal response of optical reticles

Abdo,A.Y., Reu,P.L., Schlax,M.P., Engelstad,R.L., Beckman,W.A., Mitchell,J.W., Lovell,E.G.

SPIE-The International Society for Optical Engineering
5 国際会議録 Thermomechanical modeling of the SCALPEL mask during exposure

Martin,C.J., Engelstad,R.L., Lovell,E.G., Liddle,J.A.

SPIE - The International Society for Optical Engineering
11 国際会議録 Modal Analysis of a Hybrid Grillage-Plate-Membrane Structure

Semke,W.H., Engelstad,R.L., Lovell,E.G.

Society for Experimental Mechanics
6 国際会議録 Film stress changes during anodic bonding of NGL masks

Cotte,E.P., Schlax,M.P., Engelstad,R.L., Lovell,E.G., Brooks,C.J.

SPIE - The International Society for Optical Engineering
12 国際会議録 Pattern-specific emulation (PSE) for ion-beam projection lithography masks using finite element analysis

Fisher,A.H., Engelstad,R.L., Lovell,E.G.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12