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Fabrication of a micromachined optical modulator using the CMOS process

著者名:
Chen,H. ( Industrial Technology Research Institute )
Yen,K.
Huang,H.
Chio,J.
Dai,C.
Chang,C.
Chang,P.
さらに 2 件
掲載資料名:
Optoelectronic Materials and Devices II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4078
発行年:
2000
開始ページ:
620
終了ページ:
626
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437174 [0819437174]
言語:
英語
請求記号:
P63600/4078
資料種別:
国際会議録

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