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Reduction of wafer-scale error between DI and FI in multilevel metallization hy adjusting edge detedion method

著者名:
Bae,S.-G. ( Hyundai Electronics Industries Co.,Ltd. )
Kim,Y.-K.
Park,K.-Y.
Kim,J.-S.
Lee,W.-G.
Lee,S.-W.
Lee,D.-H.
さらに 2 件
掲載資料名:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3998
発行年:
2000
開始ページ:
460
終了ページ:
469
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
言語:
英語
請求記号:
P63600/3998
資料種別:
国際会議録

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