Blank Cover Image

Process-induced defects in sub-0.15-ヲフm device patterning using 193-nm lithography

著者名:
掲載資料名:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3998
発行年:
2000
開始ページ:
277
終了ページ:
283
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
言語:
英語
請求記号:
P63600/3998
資料種別:
国際会議録

類似資料:

Okoroanyanwu,U., Levinson,H.J., Romero,J., Singh,B., Lee,S.-J.

SPIE - The International Society for Optical Engineering

Chou,S.-Y., Wang,C.-M., Hsia,C.-C., Chen,L.-J., Hwang,G.-W., Lee,S.-D., Lou,J.-C.

SPIE - The International Society for Optical Engineering

Phan,K.A., Spence,C.A., Schefske,J.A., Okoroanyanwu,U., Levinson,H.J.

SPIE - The International Society for Optical Engineering

Oh,S.-C., Kim,Y.-C., Nah,S.-H., Huh,H., Han,S.-B.

SPIE - The International Society for Optical Engineering

Choi,S.S., Jeon,Y.J., Lyu,J.-S., Yoo,H.J., Fabrizio,E.D., Grella,L., Gentili,M.

SPIE-The International Society for Optical Engineering

Vandenberghe,G., Marschner,T., Ronse,K., Socha,R.J., Dusa,M.V.

SPIE - The International Society for Optical Engineering

Okoroanyanwu,U., Levinson,H.J., Yang,C.-Y., Pangrle,S.K., Schefske,J.A., Kent,E.

SPIE - The International Society for Optical Engineering

Mulkens,J., Stoeldraijer,J.M., Davies,G., Dierichs,M., Heskamp,B., Moers,M.H., George,R.A., Roempp,O., Glatzel,H., …

SPIE - The International Society for Optical Engineering

Kuo,H.J., Lin,C.H., Tzu,S.D., Yen,A.

SPIE - The International Society for Optical Engineering

Yan,P., Tran,A., Schmidt,M.R.

SPIE-The International Society for Optical Engineering

Tabuchi,H., Shichijo,Y., Oka,N., Takenaka,N., lguchi,K.

SPIE - The International Society for Optical Engineering

Lin,H.T., Lin,J.C.H., Chiu,C.S.G., Wang,Y.Y., Yen,A.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12