Microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition in various atmospheres

Microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition in various atmospheres

著者名:

Wei, Q.

掲載資料名:

New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

616

発行年:

2000

開始ページ:

217

出版情報:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558995246 [1558995242]

言語:

英語

請求記号:

M23500/616

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00018509
シリーズID:	PA00000011
会議名:	New Methods, Mechanisms and models of Vvapor Deposition : Symposium
回次:	2000
会議開催地:	San Francisco, CA, USA
会議開催年:	2000.04.24-2000.04.26

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